Washing Equipments SA-1109
Small lot production / release agent application device specifications /

- This Equipment is the most suitable for the customers who require the clean degree of hi-specifications. This is the Automatic Device for treatment of each process with maximum 8 inches wafers for 5 pieces together at one time according to the set Recipe Parameter. It is the dipcoater Type Washing Equipment which is reflected by SDI’s techniques about Dip Coat (Dip Coating).
| Main Specifications | |
|---|---|
| Stroke | 350mm |
| Object Size | 8inch |
| Object Material | Wafer, Glass |
| Dip Speed | from 0.1 mm/sec. to 40 mm/sec. |
| Circulation Device of Coating Liquid | Equipped |
| Temperature Control of Coating Liquid | Not Equipped |
| Filter Mesh | Not Equipped (Optionally Available) |
| Drying Device | Equipped |
| Dry Temperature | Not Equipped (Optionally Available) |
| HEPA (High Efficiency Particulate Air Filter) Unit | Not Equipped (Optionally Available) |
| Equipment Dimension (mm) [approximate] | W:1850×D:900×H:1880mm |
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