This device is the equipment which can apply maximum three kinds of coating liquid to a wafer in 250 φ - 300φ　and/or a piece of metal plate. In addition, as to exchange each tank is simple & easy, it is suitable to apply and/or to evaluate many different coating liquids. The ultrasonic cleaning cistern was installed in the first tank, so it became to enable the driving such as washing, coating, rinse/conditioner as well.