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HOME > The Product Details > Nano-in Coater (Release Agent Application Device) Rotation-able Tank + with Ultrasonic Cleaning Cistern NIC-1510

Nano-in Coater (Release Agent Application Device) Rotation-able Tank + with Ultrasonic Cleaning Cistern NIC-1510

Small lot production / release agent application device specifications /

This device is the equipment which can apply maximum three kinds of coating liquid to a wafer in 250 φ - 300φ and/or a piece of metal plate. In addition, as to exchange each tank is simple & easy, it is suitable to apply and/or to evaluate many different coating liquids. The ultrasonic cleaning cistern was installed in the first tank, so it became to enable the driving such as washing, coating, rinse/conditioner as well.
Main Specifications
Stroke 320mm
Object Sizeφ250 t0.3
Object MaterialWafer, Metal Sheet
Dip SpeedFrom 0.1mm/sec. to 60mm/sec.
Circulation Device of Coating LiquidNot Including
Temperature Control of Coating LiquidNot Including
Filter MeshNot Including
Drying DeviceNot Including
Dry TemperatureNot Equipped
HEPA (High Efficiency Particulate Air Filter) UnitNot Including
Device Dimension (approx. size)W:1100×D:975×H:1410mm

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